Abstract
Permeation rates of specific gases (e.g. SO 2, NO 2) in the range of 10 −9 g min −1 were directly measured using a high performance microbalance. The gases were trapped in small permeation tubes with total weights of about 2.5 g. By controlling the microbalance's temperature the measurements were done at set temperatures between 25°C and 60°C to obtain a reference graph (permeation rate vs. temperature) for each gas. The microbalance was connected to a metered flow of a clean-air device. With adjustable flow rates up to 50 1 min −1 the permeating gas could be diluted down to volume mixing ratios in the 10 −9 and even the 10 −12 range.
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