Abstract
The results of an investigation of a discharge system with an extended hollow cathode used in the forevacuum plasma source of a ribbon electron beam are presented in the article. The influence of the geometry of the cathode cavity and the type of the plasma-forming gas on the homogeneity of the distribution of the plasma concentration in the region of the emission boundary is studied. To estimate the plasma density, we used the probe technique, as well as measurements of the optical emission spectrum of the plasma. Both methods showed qualitatively identical results. It is shown that the geometric parameters of the discharge gap of the electron source, as well as the gas pressure, exert the greatest influence on the homogeneity of the distribution of the plasma density.
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