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Abstract
The results of investigations of the processes of ignition and burning of a glow discharge with an extended hollow cathode at pressures of 3–50 Pa are presented. Such a discharge system is used in forevacuum plasma sources of ribbon electron beams. The effect of the discharge current, the geometry of the cathode cavity, pressure, and type of gas on the uniformity of the discharge plasma is studied. It is shown that at relatively low discharge currents in the cathode cavity, local regions with an increased plasma density are formed, leading to a sharp inhomogeneity of the current density of electrons extracted from the plasma.
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