Generation of array of square microcavity on quartz by ultrasonic micromachining process utilizing developed micro tool

Abstract

Quartz possesses distinct characteristics such as exceptional hardness, high brittleness, non-conductivity, remarkable corrosion resistance, efficient transmission within specific wavelengths, strong electrical insulation properties, and the ability to withstand high temperatures and thermal shocks. These extraordinary attributes have led to its component in a wide range of applications, including the fabrication of microelectronic chips, biochips, biological channels, microfluidics, optical lenses, beam-splitting lenses, etc. Ultrasonic micromachining (USMM) is a highly promising technique within the realm of micromachining to create micro features on quartz surfaces. In the present research, array of square micro tools has been designed and developed by the wire-electrical discharge machining (EDM) process. By utilizing the developed array of square micro tools, microcavity arrays have been generated by the USMM process. The influences of process parameters on material removal rate (MRR), width deviation (WD), angular deviation, and taper of square microcavities have been investigated in the present research work. The higher MRR is obtained as 1.427 mm3/min at higher abrasive slurry concentration and lower WD of micro cavities is obtained as 37 µm and lower taper angle is 1.109° at 5% abrasive slurry concentration. The lower value of angular deviation is obtained as 0.836° at a lower power rating during the generation of an array of square microcavity on quartz by the USMM process. By employing array of micro tools, the accuracy of micro features can be improved, and also productivity can be increased.