Abstract
Diamond-like carbon (DLC) films were synthesized on polyethylene (PE) substrates with a remote type microwave plasma chemical vapor deposition (MPCVD) apparatus at 10 kPa. We investigated the effect of source gas flow rate and microwave power on oxygen transmission rate of DLC films. Acetylene (C2H2) and argon (Ar) gas were used for source gas and carrier gas, respectively. From the result of contact-type profiler and atomic force microscope, oxygen transmission rate decreased as thickness increased and surface roughness decreased with increasing C2H2 flow rate. The oxygen transmission rate of DLC film synthesized at the C2H2 flow rate of 0.50 l/min and the microwave power of 1.0 kW on 300 μm thick PE substrates was 141 cc/m2·day, while that of uncoated PE substrates was 247 cc/m2·day.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
