Abstract
Mechanical and tribological properties of diamond-like carbon (DLC) films deposited by electron cyclotron resonance microwave plasma chemical vapor deposition were analyzed by nanoindentation, nanoscratch and ball-on-disk sliding tests. As the results, hardness and residual stress which depended on the substrate bias voltage had combined effects on the scratch resistance of the films. In sliding friction tests, the transferred layer on the surface of the counterpart accounts for the decrease of friction coefficient with increasing sliding distance. Atomic force microscopic images of the DLC films and the counterpart Si3N4 ball surfaces indicate that the sliding friction process could be treated as a periodical scratching process with many indenters.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
