Abstract

In this letter, we report the selective area growth of GaAs, In0.2Ga0.8As, and GaAs/In0.2Ga0.8As/GaAs quantum-well fins of 65-nm width on exactly orientated (001) Si substrates. By exploiting high aspect ratio trenches formed by patterned SiO2 on Si and a V-grooved Si (111) surface in the aspect ratio trapping process, we are able to achieve good material quality and structural properties, as evidenced by x-ray diffraction, scanning electron microscopy, and transmission electron microscopy. The fabricated GaAs-In0.2Ga0.8As-GaAs fin-array tunnel diodes exhibit a maximum room-temperature peak-to-valley current ratio of 5.4, and negative differential resistance characteristics up to 200 °C.

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