Functional Ultrathin Capacitors Obtained By Chemical Solution Deposition with Tailored Grain Size

Abstract

In this work we present a study on the preparation of functional capacitors, i.e. without electrical shorts, from ultrathin PbTiO3 films obtained by Chemical Solution Deposition methods with tailored grain sizes. The use of different diols during the synthesis stage prove to be successful to produce fine grained films at the optimum crystallization conditions that prevent the presence of detrimental secondary phases. Besides the importance of avoiding any film damage during the electrode deposition, we show that the grain size to thickness ratio is a determinant factor to successfully prepare functional capacitors down to a thickness of 34 nm.