Abstract
This paper demonstrates zinc oxide (ZnO) film formation by using supercritical fluid chemical deposition and the application of the ZnO films in improving the adhesion of Cu/glass stacks. Bis(2-methoxy-6-methyl-3,5-heptanedionate)zinc(II) was used as a precursor, and the deposition was carried out at different oxygen contents and temperatures. When oxygen content was high and/or deposition temperature was high, white polycrystalline ZnO films were deposited; otherwise, the films were brown and had a higher carbon content. XPS analyses revealed that the white ZnO films had less carbon contamination. A significant improvement in the adhesion of the Cu/glass stacks was observed when the fabricated ZnO film was inserted between Cu and glass.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
