Formation of an extended CoSi2 thin nanohexagons array coherently buried in silicon single crystal

Abstract

A Co-doped silica film was deposited on the surface of a Si(100) wafer and isothermally annealed at 750 °C to form spherical Co nanoparticles embedded in the silica film and a few atomic layer thick CoSi2 nanoplatelets within the wafer. The structure, morphology, and spatial orientation of the nanoplatelets were characterized. The experimental results indicate that the nanoplatelets exhibit hexagonal shape and a uniform thickness. The CoSi2 nanostructures lattice is coherent with the Si lattice, and each of them is parallel to one of the four planes belonging to the {111} crystallographic form of the host lattice.