Fluctuation of Position and Energy of a Fine Particle in Plasma Nanofabrication

Abstract

We are developing plasma nanofabrication, namely, nanoand micro scale guided assembly using plasmas. We manipulate nanoand micro objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of a fine particle (= each object) in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. In the first experiment, we grabbed a fine particle in plasma using an optical tweezers. The fine particle moves in a potential well made by the optical tweezers. This is a kind of Brownian motion and the position fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one. In the second experiment, we deduced interaction potential between two fine particles during their Coulomb collision. We found that there exist repulsive and attractive forces between them. The repulsive force is a screened Coulomb one, whereas the attractive force is likely a force due to a shadow effect, a non-collective attractive force. Moreover, we noted that there is a fluctuation of the potential, probably due to fluctuation of electrostatic force. These position and potential energy fluctuations may limit the accuracy of guided assembly using plasmas.