Abstract
A new thermal vacuum sensor fabricated by silicon planar technology and the micromachining of silicon, called the floating-membrane vacuum sensor, is presented. It measures pressure by measuring the heat loss of a hot plate. After an explanation of the thermal measurement of gas pressure, the theory of the operation of the sensor is discussed and experimental results are given. These agree with the theory to within 2% between 0.2 Pa and 2 kPa. The upper pressure limit of the sensors is of the order of 10 kPa, and the resolution is found to be of the order of 10 mPa.
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