Abstract
A low-offset thermal vacuum sensor, fabricated by standard bipolar integrated-circuit technology, based on the different sensitivity of two cantilever beams of unequal length is presented. After a short introduction on the working principle of the integrated thermal cantilever-beam vacuum sensor, the performance and offset of the device is calculated, and the outcome is compared to the experimental results for two different double-beam designs.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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