Abstract
The deposition of ferroelectric thin layers from solution is described. Emphasis is placed on the powder-free ceramic processing method of polymeric sol-gel processing. Materials, include, PbTiO3, PbZrO3, Pb(Zr,Ti)O3, (Pb,La)TiO3, (Pb,La)(Zr,Ti)O3, BaTiO3, (Ba,Pb)TiO3 and other related materials, including LiNbO3. Processing parameters which affect the properties of ferroelectric thin layers are reviewed, including, solution chemistry and heat-treatment conditions. The results are interpreted in terms of the chemistry of precursors and gels, densification and crystallization behaviors, and interfacial reactions with the substrate and with the atmosphere during firing. Properties are reported for each class of materials, and compared with the properties of thin layers prepared by other chemical and physical methods, and with the properties of bulk ceramics and crystals. Of particular importance is the interaction of ferroelectric thin layers with various substrate materials, including semiconductors, for potential electrical and optical devices.
Published Version
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