Abstract
Tin oxide (SnO 2 ) thin film gas sensors that function at room temperature have been fabricated on nanostructured substrates. After femtosecond laser irradiation of the surface of the SnO 2 , the sensitivity to gases, for example, carbon monoxide, increased noticeably. The dependence of the sensitivity on the number of laser pulses has been investigated. It is believed that the femtosecond laser pulses generate defects in a thin layer on the SnO 2 sensor surface. These defects may result in a potential energy well creating surface bound states for electrons to move on the surface, which increases the sensitivity to gases.
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