Features of the spectra of optical emission from high-frequency discharge plasma during bismuth ferrite sputtering

Abstract

he spectra of optical emission from plasma of the RF discharge in oxygen during the sputtering of bismuth ferrite (BiFeO3) and iron-containing alloy targets have been studied. Two anomalously intense lines of emission from iron atoms at 613.6 and 306.7 nm have been observed during the sputtering of bismuth ferrite, which are much less pronounced in the case of metal targets. The lines of emission from bismuth atoms are completely absent. A mechanism responsible for excitation of the anomalous emission lines during the sputtering of BiFeO3 is proposed.