Abstract
We have investigated the soft magnetic properties of new Fe-Cr-Hf-N and Fe-Cr-Ta-N alloy films. Thin films with compositions in the range of Fe-2/spl sim/8%Cr-0/spl sim/1%Hf (or Ta)-5/spl sim/10%N (in atomic %) were prepared by reactive sputtering in a nitrogen-containing atmosphere. The films, most likely nanocrystalline, exhibit excellent soft magnetic properties in the as-deposited condition without any post-deposition heat treatment, e.g., H/sub c//spl sim/1-2 Oe (79.4-158.8 A/m) and 4/spl pi/M/sub s//spl sim/15-20 kG. The magnetic properties are highly anisotropic in the film plane as the easy-axis M-H loop is square and the hard-axis loop is linear and closed, with the anisotropy field H/sub a/=20-60 Oe (1.59-4.77 kA/m). The films exhibit excellent high frequency behavior even in the GHz frequency range which is attributed to the combination of high 4/spl pi/M/sub s/ and relatively high H/sub a/.
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