Abstract
Soft magnetic properties of new Fe-Cr-N and Fe-Cr-Ta-N alloy films have been investigated. Thin films with compositions in the range of Fe-2∼8% Cr-0∼1% Ta-5∼15% N (in at. %) were prepared by reactive sputtering in a nitrogen-containing atmosphere. The films, most likely nanocrystalline, exhibit excellent soft magnetic properties in the as-deposited condition without any post heat treatment, e.g., Hc∼1–2 Oe (79.4–158.8 A/m) and 4πMs∼15–20 kG. The easy-axis M-H loop is square. The hard-axis loop is linear and closed, with the anisotropy field Ha=20–60 Oe (1.59–4.77 kA/m). The combination of high 4πMs and relatively high Ha in these films is conducive to the suppression of the undesirable ferromagnetic resonance (FMR) interference up to the GHz frequency range.
Published Version
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