Fast 2D hybrid fluid-analytical simulation of inductive/capacitive discharges

Abstract

A fast two-dimensional (2D) hybrid fluid-analytical transform coupled plasma reactor model was developed using the finite elements simulation tool COMSOL. Both inductive and capacitive coupling of the source coils to the plasma are included in the model, as well as a capacitive bias option for the wafer electrode. A bulk fluid plasma model, which solves the time-dependent plasma fluid equations for the ion continuity and electron energy balance, is coupled with an analytical sheath model. The vacuum sheath of variable thickness is modeled with a fixed-width sheath of variable dielectric constant. The sheath heating is treated as an incoming heat flux at the plasma–sheath boundary, and a dissipative term is added to the sheath dielectric constant. A gas flow model solves for the steady-state pressure, temperature and velocity of the neutrals. The simulation results, over a range of input powers, are in good agreement with a chlorine reactor experimental study.