Factors limiting the attainment of ultra-high vacuum below 10 −10 torr

Abstract

The present capabilities of ultra high vacuum pumping systems are such that the major limitation on the attainment of ultra high vacuum is the gas loas presented by degassing and permeation of walls and of internal components. Considerable work has been undertaken, theoretically, and experimentally, to illustrate the effects of high temperature bake-out on minimizing outgassing rates but these usually refer to effects at ambient or constant elevated temperature. The present communication analyzes the rate of degassing of components when subjected to time varying heating cycles, in terms of diffusion from the bulk of the solids. It is shown that measurements of degassing rate as a function of increasing temperature can lead to detailed knowledge of the diffusion process which is important in determining the degree of bake-out necessary for individual systems. Experimental measurements on the degassing of insulating and lubricating materials frequently used in ultra high vacuum systems are also reported and discussed.