Facile Synthesis and Characterization of New β‐Diketonate Silver Complexes. Single‐Crystal Structures of (1,1,1,5,5,5‐Hexafluoro‐2,4‐pentadionato)(2,2′‐bipyridine)silver(I) and (1,1,1,5,5,5‐Hexafluoro‐2,4‐pentadionato)(N,N,N′,N′‐tetramethylethylenediamine)silver(I) and Their Use as MOCVD Precursors for Silver Films

Abstract

AbstractThin film depositions of metallic silver were performed using metal–organic (MO) CVD on glass substrates using, as precursors, the two new compounds (1,1,1,5,5,5‐hexafluoro‐2,4‐pentanedionato)(2,2′‐bipyridine)silver(I), [Ag(hfac)(bipy)] (1), and (1,1,1,5,5,5‐hexafluoro‐2,4‐pentanedionato)(N,N,N′,N′‐tetramethylethylenediamine)silver(I), [Ag(hfac)(tmeda)] (2). Both silver compounds were characterized by single‐crystal X‐ray diffraction (XRD) measurements, indicating that 1 exists as a dimeric species, and 2 as polymeric chains. The films were analyzed by XRD, X‐ray photoelectron spectroscopy (XPS), and atomic force microscopy (AFM), revealing a high crystallinity and fairly good quality with little carbon and oxygen contamination when using the tetramethylethylenediamine derivative.