Abstract
Problem statement: A portable X-ray elemental analyzer (total reflection X-ray fluorescence spectrometer) has been developed since 2006 and this spectrometer made it possible to perform ultra trace elemental determination. The intensity of scattered X-rays that become background noise in a spectrum is reduced with the improvement in surface accuracy of an X-ray reflector used in the portable spectrometer and therefore using an X-ray reflector with an ultra-precision specular surface can lead to further improvement in detection limits obtained by the portable spectrometer. Approach: In the present paper, a combination of electrolytic in process dressing (ELID) grinding and Magnetorheological Finishing (MRF) is applied to fabricating an X-ray reflector for the portable spectrometer. Magnetorheological finishing is used as final finishing after ELID grinding. Results: A peak to valley value of 107 nm and a root mean square value of 17 nm in a surface cross section with a length of 27 mm are obtained with the use of ELID grinding and MRF. Conclusion: X-ray reflectors having a large specular surface can be fabricated using a combination of ELID grinding and MRF. Using a grinding wheel containing diamond abrasive grains finer than those in the present paper in ELID grinding can lead to further improvement in surface accuracy of an X-ray reflector.
Highlights
Total reflection X-Ray Fluorescence (TXRF) spectrometry (Yoneda and Horiuchi, 1971) is an established method for ultra trace elemental determination and various types of samples such as river water, aerosol particles, semiconductor and thin-layer films are analyzed by using this spectrometric method
electrolytic in process dressing (ELID) grindings with each abrasive wheel were performed for 30 min
Brittle fractures were caused by ELID grinding because quartz glass is a brittle material
Summary
Total reflection X-Ray Fluorescence (TXRF) spectrometry (Yoneda and Horiuchi, 1971) is an established method for ultra trace elemental determination and various types of samples such as river water, aerosol particles, semiconductor and thin-layer films are analyzed by using this spectrometric method. In TXRF spectrometry, incident X-rays irradiate a sample on a sample holder (X-ray reflector) at a glancing angle below a critical angle and excite fluorescent X-rays from the sample. The use of such low wattage X-ray tube made it possible to downsize TXRF spectrometers. Detection limits down to 10 pg (10−11g) were achieved by the present portable spectrometer and this result shows that ultra trace elemental determination is performed even when a low power X-ray tube is used. Improvement in surface accuracy of an X-ray reflector can lead to further improvement in the detection limits obtained by the present portable spectrometer. X-ray reflectivity on a reflector with a surface roughness of sub-nanometers can be as high as that on an ideal specular surface (i.e., flat surface with a surface roughness of zero)
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