Abstract
Three-dimensional magnetic nanostructures hold great potential to revolutionize information technologies and to enable the study of novel physical phenomena. In this work, we describe a hybrid nanofabrication process combining bottom-up 3D nano-printing and top-down thin film deposition, which leads to the fabrication of complex magnetic nanostructures suitable for the study of new 3D magnetic effects. First, a non-magnetic 3D scaffold is nano-printed using Focused Electron Beam Induced Deposition; then a thin film magnetic material is thermally evaporated onto the scaffold, leading to a functional 3D magnetic nanostructure. Scaffold geometries are extended beyond recently developed single-segment geometries by introducing a dual-pitch patterning strategy. Additionally, by tilting the substrate during growth, low-angle segments can be patterned, circumventing a major limitation of this nano-printing process; this is demonstrated by the fabrication of ‘staircase’ nanostructures with segments parallel to the substrate. The suitability of nano-printed scaffolds to support thermally evaporated thin films is discussed, outlining the importance of including supporting pillars to prevent deformation during the evaporation process. Employing this set of methods, a set of nanostructures tailored to precisely match a dark-field magneto-optical magnetometer have been fabricated and characterized. This work demonstrates the versatility of this hybrid technique and the interesting magnetic properties of the nanostructures produced, opening a promising route for the development of new 3D devices for applications and fundamental studies.
Highlights
During the last decades, nanopatterned magnetic materials have played a fundamental role in our society—enabling the development of ever-smaller hard disk media and bringing to unprecedented levels our ability to share information
Results we first present how FocuthseetdheErmleacltreovnapBoreaatimonIsntedpu. ced Deposition (FEBID) nano-printing has been employed to create scaffolds of the as-grown material (>80%, see Section 2), and a thin layer of carbon typically present at the surface, as a result of imaging prior to thermal evaporation, will lead to a magnetically-inert interface
NanomSaotefriaarls, 230D18n, 8a,nxoF-OpRriPnEtEinRgRuEVsiInEWg FEBID has been mostly focused on the creation of segments6wofit1h2 widths determined by the intrinsic resolution of the technique [10,14,18]
Summary
During the last decades, nanopatterned magnetic materials have played a fundamental role in our society—enabling the development of ever-smaller hard disk media and bringing to unprecedented levels our ability to share information. Low segment-angle structures are overcome by employing substrate tilting during growth The combination of these methods greatly increases the types of nanostructures available through 3D nano-printing and the range of applicability of the technique. We will discuss our approach used to introduce width, the importance of nanostructure supports during thin-film deposition, and how substrate tilt is used to create The combination of these methods greatly increases the types of nanostructures available through. We will discuss our approach used to introduce width, the importance of nanostructure supports during thin-film deposition, and how substrate tilt is used to create suspended ‘staircase’ nanostructures in which some segments lie parallel to the substrate Following this discussion, a practical case in which individual nanowire devices have been tailored to match a dark-field magneto-optical setup will be presented. Acceleration voltages of 30 keV have been used, with beam currents of 25 pA
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