Abstract

We discuss fabrication of GaAs quantum wires and dots using both selective growth and spontaneous growth technique in MOCVD, including the optical properties of those nano-structures. In the selective growth, triangular-shaped GaAs quantum wires as narrow as 7nm and quantum dots with 25nm lateral width were obtained. The quantum confinement effect is evidenced by photoluminescence (PL) and magneto-PL. On the other hand, self-organizing growth achieved InGaAs quantum dots with a diameter of 15nm. For characterization of the nanostructures, observation of photoluminescence from a single quantum dot was achieved. Finally, as the first step to the ultimate quantum lasers, a vertical microcavity quantum wire lasers was demonstrated.

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