Abstract
► The OTFTs with the nano-groove Al gate electrodes were fabricated by UV nano imprint technology. ► The nano-groove Al gate electrodes were fabricated by UV nano imprint and reactive ion etching. ► The molecular orientations of pentacene were improved by nano-groove Al structures. ► The OTFTs with nano-groove Al gate electrodes have much better performances than those with the single ones. In this work, the OTFTs with the nano-groove Al gate electrodes were fabricated by UV nano imprint technology. The flexible UV transparent ETFE mold was fabricated by the hot-embossing with the HSQ master mold. The nano-groove Al gate electrodes with the line/space about ∼95/355 nm were fabricated successfully. The performance of OTFTs was improved and the proposed process will be suitable for the future roll-to-roll process of the flexible electronics.
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