Abstract
By employing the simple patterning and regrowth procedures, one-dimensional and two-dimensional (2D) periodically polarity inverted (PPI) ZnO structures are fabricated on (0001) Al2O3 substrates. For the selection of Zn- and O-polarity of ZnO films, patterned CrN buffer layers and Al2O3 substrates are used, respectively. The periodical change of the polarity is clearly confirmed by the polarity sensitive piezoresponse microscopy images, which are evidences for the successful fabrication of periodical polarity inversion structures. Cathodoluminescence investigation revealed that both polar layers have high crystal quality with strong free exciton emission. Moreover, 2D PPI ZnO structures with subnanometer scale periodicity are demonstrated by using the holographic lithography.
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