Fabrication of monodomain alumina pore arrays with an interpore distance smaller than the lattice constant of the imprint stamp

Abstract

Large-area monodomain porous alumina arrays with an interpore distance of 500 nm are fabricated by imprint lithography. A 4 in. imprint master fully compatible with silicon technology was developed, which allows imprint pressures as low as 5 kN/cm2 for direct imprint on aluminum. Due to the self-ordering phenomenon of porous alumina growth, we were able to reduce the interpore distance of the pore array to 60% of the lattice constant of the master stamp. Three lithographically defined pores are sufficient to guide anodization of a new pore in the center.