Abstract
Electrochemical micromachining (EMM) has become more and more important in micro machining in recent years. Micro electrode as the tool of EMM is an essential cell in the machining process. In this study, micro cylindrical electrode is fabricated by electrochemical etching firstly. Second, the flat end shape forming methods for micro cylindrical electrode is investigated. And then, micro electrodes with flat end shape fabricated above is used in electrochemical micro milling process. Finally, a 3D micro structure with three steps is machined on metallic materials by above micro cylindrical electrode with flat end shape.
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