Abstract
This paper describes a new method, which combines one pulse electrical discharge machining technology with electroChemical micro machining (EMM), to fabricate micro spherical electrode and micro spherical cavities. First, micro spherical electrode is fabricated by electroChemical etching with one pulse electrical discharge (OPED) machining technology. During the OPED process, the predominant parameters, such as the appLied voltage, the electric discharge duration, the peak current, which impact the fabrication of the micro spherical electrode were studied. Then, some burnished micro spherical electrodes with diameter of several ten micrometers could be formed instantaneously. At last, three micro spherical cavities were fabricated with the type of above micro spherical electrode by EMM process.
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