Abstract
An under exposure method based on Fresnel diffraction effect in a conventional optical lithography system is used to fabricate large-scale, uniform spherical-cap structures. This method provides an effective roughening technology on the top surface of light-emitting diodes (LEDs) to improve the light extraction efficiency of LEDs. LEDs with high duty cycle spherical-cap structures showed enhanced light output power by 130%–160% compared with the LED with a flat surface. This simple and easy shape control method has potential applications in other optical devices such as organic LEDs, inorganic solar cells, and laser diodes.
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