Abstract

ABSTRACTWe have investigated the hexagonal graphene network (GNW) structure for the possible opening of the graphene bandgap. We have fabricated GNW by nanoimprint lithography and compared with previous GNW results based on electron beam (EB) lithography. Hall-bar device with GNW was successfully fabricated using nanoimprint lithography and verified mobility of 1,220 cm2 V-1 s-1 with graphene nanoribbon (GNR) width of 40 nm. The mobility improvement compared with GNW by EB lithography indicates the effectiveness of nanoimprint method for the hexagonal GNW approach.

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