Abstract
To fabricate conductance-controllable standard leak elements, a selective coating method was developed to achieve a specific open area on anodic aluminum oxide. Aluminum oxide with an optimized thickness was deposited onto anodic aluminum oxide by ion beam sputtering, acting as a cover layer to seal the redundant pores in anodic aluminum oxide. Two leak elements with different uncovered areas were fabricated, and the values of their conductance were measured. The results indicate that the conductance of the leak elements can be controlled by the size of the uncovered area. The diameter of the tubes in the anodic aluminum oxide is approximately 70 nm, and gases such as helium flowing through the tubes exhibit molecular flow from vacuum to atmospheric pressures. Hence, the values of conductance of the leak elements are predictable for noncondensable gas species.
Published Version
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