Abstract
The Fresnel zone plate (FZP) is a type of lens for focusing X-rays. We have fabricated a kinoform style FZP with a 30-step structure composed of concentric multilayer of alternating Cu layer, Al layer, and 28 composite material (Cu, Al) layers. The multilayer was deposited using a magnetron sputtering apparatus with two DC-sputtering guns. The focusing characteristics were evaluated at the synchrotron radiation beamline of SPring-8, and the focused beam size measured by knife-edge scanning was 0.8 μm at 40 keV. The peak diffraction efficiencies measured using ion chambers for 1st- and 2nd-order diffraction were 42% and 12% at 40 keV and 20 keV, respectively. High-order X-ray diffraction was also examined using the data obtained from a CCD camera.
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