Abstract

Abstract Design, fabrication and optical characterization of micro Fresnel Zone Plates (FZP) are successfully demonstrated. These micro FZPs are composed of circular rings that have a maximum size of 9.4 mm in diameter and a minimum ring width of 2 μm. The absorber material is sputtered tungsten with a thickness of 0.5 μm that is deposited on top of a 2.5 μm thick low-stress nitride membrane. An optical system that is composed of a He-Ne laser, a pin-hole, various lenses and a CCD camera, is setup to measure the optical characteristics of micro FZPs. It is found that the relative intensity can be magnified about 100% higher by using these FZPs. These FZPs are powerful tools for forming images in the spectral region of infrared light, X- and gamma-rays where regular glass lenses can not be functional.

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