Fabrication and Machining of SiCN for Pressure Sensor at High Temperature for Aero-Engines Applications

A Leo,I Stiharu,Si Andronenko

doi:10.18689/ijmsr-1000106

Abstract

Fabrication and Machining of SiCN for Pressure Sensor at High Temperature for Aero-Engines Applications

Highlights

Pressure measurement is required in many engineering applications as it provides valuable information for performance analysis
This work shows, that SiCN ceramics derived from commercially available liquid polymer precursor CERASETTM, can be successfully used to create different shaped ceramics details
Like SiCN/Fe is of special interest, because they can be used in high temperature MEMS applications as very sensitive magnetic field sensors.This work clearly shows, that at first step, by using a tube furnace with maximum temperature 1200° C, one could not reach SiCN ceramics with good mechanical properties

Summary

Introduction

Pressure measurement is required in many engineering applications as it provides valuable information for performance analysis. SiCN fabrication includes thermosetting, crosslinking and pyrolysis This technology is still under investigation to improve the stability of the process and improved performance of the material. Goal 1: To develop new materials, based on SiCN ceramics, by incorporating appropriate transition metal ions chemically bonded to SiCN ceramic network during fabrication process with stable electric and magnetic properties up to 1900° C. Goal 3: Develop reliable and low-cost technique of synthesis of these ceramic materials, and investigate the possibility to eliminate micro- and macro-porosity, as well as micro-cracking, which considerably decrease the hardness of these ceramic materials This is accomplished through accurate control of the volatile phase evaporation in the polymer during the pyrolysis process.The long-range objective of the proposed project is to exploit the acquired knowledge to enable the fabrication of SiCN mono-crystalline semiconducting material from the polymer precursor. This paper will further report on some of the results obtained while aiming the three above stated goals

Problem Formulation

Mechanical Properties

The hardness of the material

Machining of SiCN

Conclusion