Abstract
Metallic LaNiO 3 (LNO) films were prepared on LaAlO 3 (LAO) and Si substrates by metal-organic decomposition (MOD) and their application as the bottom electrode for sol-gel derived (BaSr)TiO 3 (BST) thin films was studied. X-ray diffraction, atomic force microscope and electrical measurements were used to characterize the multilayer films of BST/LNO/substrates. BST film on LNO-coated LAO substrate exhibited preferred (100) orientation. Smooth and dense surface with fine grains (∼50 nm) was observed. The electrical measurement results on BST films using LNO and stainless steel as the bottom electrodes, respectively, showed BST/LNO/substrates have higher dielectric constant, lower loss tangent, lower leakage current and higher breakdown voltage.
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