Abstract
We have fabricated NdBa2Cu3O7-y (NBCO) superconducting thin films by metal-organic chemical vapor deposition(MOCVD) using fluorinated or nonfluorinated liquid state sources. In the case of the films deposited using nonfluorinated sources, we found that at P O2 =0.65 Torr oxygen partial pressure, the samples of the composition deviated from stoichiometry has better crystallinity than the samples of stoichiometric composition. However, at P O2 =0.01Torr, we are able to obtain high quality c-axis oriented films in the stoichiometric composition. These samples using nonfluorinated sources on (100) SrTiO3 at P O2 =0.01 Torr shows Tc(zero)=50K. Then we obtained that the apparent correlation between Nd-Ba substitution and the c-axis length. We observed characteristic by magnetic measurements but a semiconducting one by electric measurements. This was considered to have relations with a structural non-uniformity observed transmission electron microscopy.
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