Abstract
One of the main drawbacks of the current flexible devices is the lack of a thin-film encapsulation with superior moisture barrier performance, light transmittance and mechanical flexibility. In this study, an inorganic/organic/inorganic composite film was fabricated on a 10 cm × 10 cm polyethylene naphthalate (PEN) substrate, which consisted of two inorganic layers of Al2O3 with an organic layer of organic polysilazane (OPSZ) in between. Al2O3 was deposited via plasma-enhanced atomic layer deposition (PEALD) with a thickness of about 40 nm. Approximately 200 nm thick OPSZ was prepared using the spray-spin coating method. The multilayer film exhibited outstanding optical transmittance (>90%) and an extremely low water vapor transmission rate (WVTR) (4.6 × 10-5 g per m2 per day, 38 °C, 90% RH), which is two orders of magnitude lower than that of the corresponding single-layer Al2O3 film. Moreover, the introduction of an organic layer helped the Al2O3/OPSZ/Al2O3 film to exhibit good tensile and bending resistance. Thus, the multilayer film may find applications in the encapsulation of flexible devices.
Published Version
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