Fabrication and Characterization of a Sensing Device Based on Porous Silicon

Abstract

In this work we have fabricated a simple gas-sensing device based on porous silicon. Starting from the well-known porous silicon photoluminescence quenching due to oxygen, we have optimized the material and the device design, obtaining a reversible and stable O2 gas sensor. A simple and cheap detector of air leaks in inert environment is of great interest for the alimentary industry. Full characterization of the device has been carried out in a gas sensor calibration apparatus, showing even a promising sensitivity at room temperature to a toxic gas like NO2.