Fabricating Au micro-pattern arrays on flexible substrate with high fidelity

Abstract

► A method of fabricating Au micro-pattern arrays on flexible substrate is proposed. ► The method integrates the conventional microfabrication process with a transfer process. ► A model is established to analyze the transfer process. ► Various Au micro-patterns can be fabricated by the method with high fidelity. A method of fabricating the Au micro-pattern arrays on the flexible substrate is proposed, which consists of making Au patterns on the hard substrate by the conventional microfabrication process, and then transferring the Au patterns on the flexible substrate by a medium layer. The main advantage of the method is that the high-quality Au pattern arrays can be easily obtained on the flexible substrate. The high quality of Au patterns on the hard substrate can be guaranteed by the conventional microfabrication process, and meanwhile it is convenient to control the transfer conditions so as to bring no damage to Au patterns during transfer process. As a result, various Au micro-pattern arrays are fabricated on the flexible substrate with high fidelity.