Extraction and transport of low-energy Ar ion beams with a broad cross-section

Abstract

Low-energy argon (Ar) ion beams were accelerated from a quiescent discharge in a custom-designed ion reservoir. Around 100 eV Ar ion beams were extracted from an ion source with different multi-cusp magnetic field configurations through a 4-cm diameter two-electrode extraction system. Langmuir probe measurements correlated the source plasma characteristics to the extracted ion beam properties that were determined using a retarding potential analyzer and a moving Faraday cup. The ion extractor configuration allowed primary electrons from the ion reservoir to seep downstream to neutralize the space-charge of the Ar ions. The broad cross-section ion beam system is designed for material synthesis and surface modification.