Ar and O2 linear ion beam PET treatments using an anode layer ion source

Abstract

Polyethylene terephthalate (PET) substrate has been used for various applications that require specific surface treatments for enhancing adhesion, gas permeation, and water contact angle. In this work, PET treatment using linear ion beams has been investigated using a roll-to-roll PET treatment process. An anode layer linear ion source generated the Ar and O2 linear ion beams. The ion energy of 0.1–1 keV and the ion dose of 0.51 × 1017 cm−2 were used. Optical emissions during the ion beam treatment of the PET surface showed the emissions of by-products such as CO, H, and OH. The PET surfaces treated by the Ar ion beams were smooth and showed water contact angles of 35–55°. The O2 ion beam-treated PET was effectively etched and the water contact angle was dramatically decreased to <20°.