Abstract
Plasmonic titanium nitride (TiN) nanorod arrays (NRA) were fabricated by glancing angle deposition in a DC magnetron reactive sputtering system. The morphology of the TiN NRA was varied by collimating the vapor flux. The transmittance, reflectance, and extinctance of slanted TiN nanorods with different lengths as functions of wavelength and angle of incidence were measured and analyzed. The extinction peaks in the spectra reveal the transverse and longitudinal plasmonic modes of TiN NRA upon excitation by s-polarized and p-polarized light, respectively. The near-field simulation was performed to elucidate localized field enhancements that correspond to high extinction. The extension of the high extinction band with an increasing length of the nanorods results in broadband and wide-angle light extinction for a TiN NRA with a thickness greater than 426 nm.
Highlights
In recent years, nanostructures made of plasmonic materials have held a very important position in the field of science and technology
Slanted titanium nitride (TiN) nanorod arrays (NRA) were grown by self-shadowing in a DC reactive magnetron sputtering system
The morphology of the obliquely deposited TiN NRA was varied by varying the deposition angle
Summary
Nanostructures made of plasmonic materials have held a very important position in the field of science and technology. With a high melting point and chemical stability at temperatures above 2900 ◦ C, TMNs exhibit a mechanical refractory property and have the same optical property as noble metals [7]. GLAD was used to grow a tilted TiO2 nanorod array (NRA) by electron beam evaporation, and the TiO2 NRA was transformed into TiN NRA via nitridation with annealing [27]. In this investigation, glancing angle deposited TiN NRAs were grown in a magnetic sputtering system. The localized plasmonic resonance corresponding to high-efficiency light extinction was simulated using finite-difference time-domain (FDTD)
Sign-in/Register to view highlights & summary 
Published Version (
Free)
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call