Abstract
In this work, titanium nitride (TiN) nanorod arrays were fabricated using glancing angle deposition in a magnetron sputtering system. The deposition parameters, including the bias on the substrate and the flow rate of nitrogen, were varied to deposit various TiN nanorod arrays. Before glancing angle deposition was conducted, uniform TiN films were deposited and their permittivity spectra, for various deposition parameters, were obtained. The effect of the deposition parameters on the morphology of the nanorods is analyzed here. The polarization-dependent extinctance spectra of TiN nanorod arrays were measured and compared. Extinction, which corresponds to the longitudinal mode of localized surface plasmon resonance, can be significantly changed by tuning the N2 flow rate and substrate bias voltage during deposition.
Highlights
Noble metal nanoparticles with light-induced excitations, known as localized surface plasmon resonances (LSPRs) [1], have been widely exploited in optical nanoantennas [2], energy harvesting devices [3], ultrafast optical switching technologies [4,5], data storage [6], surface-enhanced Raman scattering [7], sensor applications [8], and biophotonics [9]
The second set shows that the maximum extinctance values are 92.9%, 94.8%, and 80.6% at wavelengths of 616 nm, 725 nm, to 876 nm for samples deposited at the N2 flow rates of 1.2 sccm, 1.5 sccm, to 3.5 sccm, respectively
The redshift phenomena of both sets come from the permittivity of titanium nitride (TiN) nanorod arrays (NRAs) which varies with deposition parameters
Summary
Noble metal nanoparticles with light-induced excitations, known as localized surface plasmon resonances (LSPRs) [1], have been widely exploited in optical nanoantennas [2], energy harvesting devices [3], ultrafast optical switching technologies [4,5], data storage [6], surface-enhanced Raman scattering [7], sensor applications [8], and biophotonics [9]. These resonances provide extremely large, highly localized electric field enhancements in the immediate vicinity of the metal nanoparticles. A near-field simulation was adopted to demonstrate that the resonance wavelength shifted with the tunable permittivity
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