Abstract
This paper proposes a novel non-contact ultrasonic motor based on near field acoustic levitation (NFAL), which is composed four flexure pivot-tilting pads with high-frequency driven by piezoelectric actuators (PZTs). The motor adopts a flexible structure with self-adaptive capacity to generate acoustic radiation force and acoustic radiation torque acting on the rotor. A theoretical model by coupling the Reynolds equation with the consideration of the mode shape of the pads and the motion equation of the rotor was introduced. A test apparatus was designed and fabricated to measure the working characteristics of the motor. These results provide a deeper understanding of the working mechanism of the non-contact ultrasonic motor and the proposed motor may have promising potential for automatic industries.
Published Version
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