Abstract
In this paper we report significant improvements for microelectromechanical system (MEMS) resonators. In our previous work, the reduction in gap between a driving electrode (DE) and a resonant plate was achieved by sliding DEs, showing a clear resonance at 12 MHz. However, it needed a large pull-in voltage and an elaborate measurement technique. In this study, we design soft springs for DEs and evaluate a two-port configuration to cancel feedthrough current. Measurement results show that the pull-in voltage is successfully decreased by one-third that for the previous resonator and a resonance is observed in a fabricated two-port circuit. Such a pull-in voltage can be sufficiently generated from a 2.5 V source in combination with a charge pump circuit. These results are useful for adopting the MEMS resonators to real applications.
Published Version
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