Abstract
In recent years several low cost computer controlled residual gas analyzers (RGAs) have been introduced into the market place. It would be very useful to know the performance character- istics of these RGAs in order to make an informed selection for UHV applications. The UHV applications include extreme sensitivity helium leak detection and monitoring of the residual gas spectra in UHV systems. In this article, the sensitivity and linearity data for nitrogen, hydro-gen, and helium are presented in the pressure range 10−8–10−1 Pa. Further, the relationships between focus voltage and ion currents, relative sensitivity, and fragmentation factor are also included. A direct comparison method is used in obtaining this data. Spinning rotor and extractor gauges are the transfer standard gauges used in Jefferson Lab’s vacuum calibration facility, with which all the reported measurements here were carried out.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
