Abstract
The residual gas analysis program SGAP calculates the residual gas composition and the true total pressure from the spectra of residual gas analyzers and the N2 equivalent ionization gauge reading by a least-squares adjustment. This program was used for the interpretation of a large number of residual gas spectra obtained with different types of residual gas analyzers. The “mass sensitivity” for a particular gas, defined as the ratio of the residual gas analyser reading and the ionization gauge reading has been taken carefully into account. The residual gas compositions obtained by this program for a variety of vacuum systems (sputter ion pump system, cryosorption pump system, turbomolecular pump system, etc.) are given. The agreement between measured and adjusted values and also results from two or more instruments operating simultaneously in the same vacuum indicate an accuracy of about 1%–3% for the residual gas concentrations.
Published Version
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