Abstract
Journal Article Estimation of the Electron Beam Energy Spread for TEM Information Limit Get access Michael A O'Keefe, Michael A O'Keefe National Center for Electron Microscopy, LBNL B72, One Cyclotron Road, Berkeley, CA 94720, USA Search for other works by this author on: Oxford Academic Google Scholar Peter C Tiemeijer, Peter C Tiemeijer FEI Electron Optics, Building AAEp, PO Box 80066, 5600 KA Eindhoven, The Netherlands Search for other works by this author on: Oxford Academic Google Scholar Maxim V Sidorov Maxim V Sidorov Advanced Micro Devices, One AMD Place, P.O. Box 3453, M/S 32, Sunnyvale CA 94088, USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 8, Issue S02, 1 August 2002, Pages 480–481, https://doi.org/10.1017/S1431927602105344 Published: 01 August 2002
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