Abstract
Sub-Ångstrom transmission electron microscopy has been achieved at the National Center for Electron Microscopy (NCEM) by a one-Ångstrom microscope (OÅM) project using software and enhanced hardware developed within a Brite-Euram project (Ultramicroscopy 64 (1996) 1). The NCEM OÅM provides materials scientists with transmission electron microscopy at a resolution better than 1 Å by using extensive image reconstruction to exploit the significantly higher information limit of an FEG-TEM over its Scherzer resolution limit. Reconstruction methods chosen used off-axis holograms and focal series of underfocused images. Measured values of coherence parameters predict an information limit of 0.78 Å. Images from a [1 1 0] diamond test specimen show that sub-Ångstrom resolution of 0.89 Å has been achieved with the OÅM using focal series reconstruction.
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